Additive manufacturing (AM) of micro parts is gaining great interest now that a lot of industrial metals like titanium and aluminum are established AM processes. The next challenge is increasing the resolution within these processes in the production of micro-sized parts to achieve good surface quality to minimize post-processing. Many remarkable results regarding the production of micro parts have been published. For example, parts with a resolution of 35 µm were made from tungsten using laser micro sintering [1]. Laser Zentrum Hannover e.V. has been working in the field of AM [2] since 1992, focusing on micro manufacturing and establishing processes on special materials. Machine systems for laser metal deposition as well as selective laser melting (SLM) have been built up within several research projects.