The challenge of a rapid production of high precision optical coatings implicates the need to realize a variety of complex coating designs in one process environment. Two approaches of enhancing a stable deposition process are presented. Firstly, a virtual deposition system is applied for a pre-selection of coating designs that result in an increased process stability using optical broadband monitoring (BBM) strategies. Secondly, the optical broadband monitoring is combined with additional quartz crystal sensors to realize a hybrid process control for improved layer thickness accuracy. Finally, a successful combination of both approaches is demonstrated by comparative studies of virtual and real deposition processes.