K. Obata
J. Koch
B. N. Chichkov

Individually controlled multi-focus laser processing for two-photon polymerization

SPIE Photonics West: LASE
23.-28. Januar
San Francisco
2010
Type: Konferenzbeitrag
Abstract
A parallel processing of two-photon polymerization structuring is demonstrated with spatial light modulator. Spatial light modulator generates multi-focus spots on the sample surface via phase modulation technique controlled by computer generated hologram pattern. Each focus spot can be individually controlled in position and laser intensity with computer generated hologram pattern displayed on spatial light modulator. The multi-focus spots two-photon polymerization achieves the fabrication of asymmetric structure. Moreover, smooth sine curved polymerized line with amplitude of 5 μm and a period of 200 μm was obtained by fast switching of CGH pattern.