Multiphoton laser lithography for the fabrication of plasmonic components
SPIE Optics + Photonics: NanoScience + Engineering
16.-17. August
San Diego
2006
Type: Konferenzbeitrag
DOI: 10.1117/12.680418
Abstract
In this contribution, we demonstrate multi-photon femtosecond laser lithography for the fabrication and rapid prototyping of plasmonic components. Using this technology different dielectric and metallic SPP-structures can be fabricated in a low-cost and time-efficient way. Resolution limits of this technology will be discussed. Investigations of the optical properties of the fabricated SPP-structures by far-field leakage radiation microscopy will be reported.