A. L. Stepanov
M. F. Galyautdinov
A. B. Evlyukhin
V. I. Nuzhdin
V. F. Valeev
Y. N. Osin
E. A. Evlyukhin
R. V. Kiyan
T. S. Kavetskyy
B. N. Chichkov

Synthesis of periodic plasmonic microstructures with copper nanoparticles in silica glass by low-energy ion implantation

Applied Physics A - Materials Science & Processing
1
111
261-264
2013
Type: Zeitschriftenaufsatz (reviewed)
Abstract
Ion implantation was used to locally modify the surface of silica glass to create periodic plasmonic microstructures with Cu nanoparticles. Nanoparticles were synthesized by Cu-ion irradiation of the silica glass at the ion energy of 40 keV, dose of 5×1016 ions/cm2 and current density of 5 μA/cm2. This procedure involves low-energy ion implantation into the glass through a mask placed at the surface. Formation of nanoparticles was observed by optical spectroscopy and atomic force microscopy. The presented results clearly demonstrate how the low-energy ions can be used for the fabrication of photonic microstructures on dielectric surfaces in a single-step process.