K. Obata
A. El-Tamer
L. Koch
U. Hinze
B. N. Chichkov

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

Light: Science & Applications
12
2
e116
2013
Type: Zeitschriftenaufsatz (reviewed)
Abstract
We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures, with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup, where a microscope objective (1003 high NA), immersion oil and cover glass can be moved together into the photosensitive material, resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7mmare demonstrated, which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.