Mixed oxide coatings for optics
Applied Optics
9
50
C69-C74
2011
Type: Zeitschriftenaufsatz (reviewed)
DOI: 10.1364/AO.50.000C69
Abstract
Material mixtures offer new possibilities for synthesizing coating materials with tailored optical and mechanical properties. We present experimental results on mixtures of HfO2 , ZrO2 , and Al2O3 , pursuing applications in UV coating technology, while the mixtures are prepared by magnetron sputtering, ion beam sputtering, plasma ion-assisted deposition (PIAD), and electron beam evaporation without assistance. The properties investigated include the refractive index, optical gap, thermal shift, and mech anical stress. The first high reflectors for UV applications have been deposited by PIAD.