M. Mende
S. Günster
H. Ehlers
D. Ristau

Optical Properties of Ion Beam Sputtered Oxide Mixture Coatings

Optical Interference Coatings (OIC)
6.-11. Juni
Tucson
2010
Type: Konferenzbeitrag
Abstract
Mixture thin films with different ratios are produced by ion beam sputtering. The refractive index is correlated with the composition determined by energy dispersive X-ray spectroscopy. Results for HfO2/Al2O3, Ta2O5/SiO2 and Al2O3/SiO2 mixtures are presented.