IBS 2000: Large are ion beam sputtering coating machine
SPIE Optical Systems Design
08. April
Straßburg
2024
Type: Konferenzbeitrag
Abstract
Coatings of large-area optics with demanding thin-film systems such as bandpass filters or beam splitters are required by both the astronomy sector and large laser facilities. The purpose of the “IBS 2000” project is the development of a coating machine that will coat substrates with a diameter of up to two meters. Key criteria for the coatings are low optical losses, stability against laser radiation, and precise spectral properties. Therefore, the ion beam sputtering (IBS) process is chosen since this technology delivers coatings of the highest optical quality and high mechanical and environmental stability.
Typical coating processes have a common limitation regarding the size of the coated optics since they utilize a stationary deposition material source and moving, typically rotating, optical components. To achieve homogeneous coating thicknesses, this approach, however, is limited to optics, which are smaller than the sizes of the deposition material source, as an example a boat evaporator. To overcome this restriction, a novel approach has been developed in the IBS2000-Project, in which the sputter assembly is located below the substrate and will move linearly in combination with a rotating substrate.
This contribution presents the mechanical concept and the simulation of the deposition conditions and process. Simulations regarding homogeneity are made with a virtual coater concept, which was developed at the Laser Zentrum Hannover (LZH). First, the material distribution is calculated for a static sputter material carrier. This calculation provides the material distribution in the substrate plane. The calculated sputter distribution is combined with the movement of the target carrier and the substrate rotation and provides a first indication of the 2D distribution over the full substrate scale. These results were then applied to develop mechanical concepts to coat large-area optics up to diameters of 2 meters and homogenize the projected coating distribution.