Study of the optical properties of diamond-like coatings prepared by Laser-Arc
Diamond and Related Materials
11
2
1424-1429
1993
Type: Zeitschriftenaufsatz (non-reviewed)
Abstract
The laser-Arc as controlled pulsed arc plasma source was used to prepare diamond-like coatings (DLC) for optical applications. DLC films with thickness of up to 500 nm were deposited on different substrate materials (ZnSe, NaCl, KCl, Ge) using special preparation techniques for enhancing the substrate-film adhesion. Coating was performed at room temperature in a vacuum of 10-4Pa. A special moving substrate holder was used to deposit an all-round protective DLC that covered the complete surface of the salt substrates including the rims.