F. Carstens
H. Ehlers
S. Schlichting
L. O. Jensen
D. Ristau

High-Resolution Optical Broadband Monitoring for the Production of Miniaturized Thin-Film Filters

Optical Interference Coatings (OIC)
02.-07. Juni
Santa Ana Pueblo
2019
Type: Konferenzbeitrag
Abstract
To bring a cost-effective, scalable and modular technology platform to the telecom- and sensors-market, the Poly-Board was developed by the PolyPhotonics research association. Herein the LZH participates with research and production of miniaturized TFF for a variety of applications at the interface between optics and electronics. Because of the individual specifications of the different applications a broadband-monitoring approach was chosen to control the layer thicknesses. However, a major challenge is to meet the increasingly demanding specifications of the different filters despite the small budget of total allowed filter thickness, forced by the miniaturized filter dimensions. The available optical broadband monitoring systems used so far for layer-thickness control did not provide the needed thickness accuracy due to resolution-limiting effects. Coating simulations taking into account this resolution limitation indicated that an increase of the spectral resolution of the monitoring system could mitigate this problem. Therefore, it was decided to develop and evaluate a suitable high-resolution monitoring system (HR-BBM). A comparison between the simulation of the standard BBM system and the high-resolution BBM system by means of a computational manufacturing approach and the experimental evaluation of the new HR-BBM monitoring system will be presented in full detail in our conference contribution.