Reduction of Nanoparticles in Optical Thin Films
Proceedings of the Optical Interference Coatings Conference (OIC)
WC.5
2022
Type: Zeitschriftenaufsatz (non-reviewed)
Abstract
The paper presents a concept for the reduction of nanoparticles in optical thin films using ion etching, to remove nanoparticles present on the substrate, and to reduce the effects of particles introduced during deposition.