K. Obata
B. N. Chichkov

Advanced Femtosecond Laser Micro/Nanostructuring using Phase Modulation Technique

International Journal of Optoelectronics
4
7
296-303
2014
Type: Zeitschriftenaufsatz (reviewed)
Abstract
Parallel processing by two-photon polymerization structuring with a spatial light modulator is demonstrated. The spatial light modulator generates multi-focus spots on the sample surface based on phase modulation technique controlled by computer generated hologram (CGH) pattern. Each focus spot can be individually controlled in position and can be switched on and off with the computer generated hologram pattern, displayed on the spatial light modulator. Moreover, multi-focus spot two-photon polymerization of smooth sine curved polymerized line was obtained in 3-D by fast switching of the CGH pattern.