Investigation of the refractive index reproducibility for tantalum pentoxide coatings, prepared by PVD techniques
Optical Interference Coatings, OSA Technical Digest
ThD.2
2016
Type: Zeitschriftenaufsatz (non-reviewed)
Abstract
Random effects in the reproducibility of refractive index and absorption edge position of Ta2O5 layers prepared by plasma-ion assisted electron beam evaporation, ion beam sputtering, and magnetron sputtering are investigated and quantified.