Gruppenleiter Laser-Mikrobearbeitung
Abteilung Photonik Integration
E-Mail: j.koch@lzh.deTelefon: +49 511 2788-217
Kurzbiographie
Studium der Physik an der Universität Hannover (heute: Leibniz Universität Hannover), Abschluss als Diplom-Physiker.
Seit 2003 ist Jürgen Koch am Laser Zentrum Hannover e. V. (LZH) tätig. Von 2003 bis 2006 als wissenschaftlicher Mitarbeiter, von 2006 bis 2011 Leiter der Gruppe Femtosekundenlasertechnologie.
Jürgen Koch ist seit 2011 Leiter der Gruppe Laser-Mikrobearbeitung in der Abteilung Photonik Integration.
Hauptforschungsgebiete
- Laser-Materialbearbeitung im Mikro- bis Sub-Mikrometerbereich
- Wechselwirkungsprozesse ultrakurzer Laserpulse mit Materie
- System- und Prozesssteuerung für die Laser-Mikrobearbeitung
LZH-Veröffentlichungen
Zeitschriftenaufsatz (reviewed) (58)
Ultrashort pulse laser micro processing strategies for fast beam deflection with acousto-optical deflectors
Procedia CIRP
Vol. 124
712-715
2024
High-resolution silicon photonics focused ultrasound transducer with a sub-millimeter aperture
Optics Letters
10
48
2668-2671
2023
Silicon-photonics focused ultrasound detector for minimally invasive optoacoustic imaging
Biomedical Optics Express
12
13
6229
2022
Two-Dimensional Laser Melting of Lunar Regolith Simulant Using the MOONRISE Payload on a Mobile Manipulator
3D Print. Addit. Manuf.
2021
A Novel All-Optical Focused Ultrasound Detector for Intravascular Lipid Imaging
Proc. European Conference on Biomedical Optics (ECBO), OSA Technical Digest
ETu5B.5
2021
Laser-induced forward transfer as a potential alternative to pick-and-place technology when assembling semiconductor components
Journal of Laser Applications
4
33
042030
2021
Picosecond laser ablation of millimeter-wave subwavelength structures on alumina and sapphire
Optics & Laser Technology
142
107207
2021
Characterization and Functionalization of Flexographic Printing Forms for an Additive Manufacturing Process of Polymer Optical Waveguides
Journal of Laser Applications
33
012017
2020
Surface functionalization of flexographic printing forms using a femtosecond laser for adjustable material transfer in MID prod
SPIE Proceedings Vol. 11267: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV
112670F
2020
Process controller for scanning laser surface machining on cylinder surfaces
Proc. Lasers in Manufacturing (LiM)
348
2019
Hybrid UV laser direct writing of UV-curable PDMS thin film using aerosol jet printing
Applied Physics A
2
125
95
2019
Multimaterial bathless stereolithography using aerosol jet printing and UV laser based polymerization
Journal of Laser Applications
31
2019
022301-1 - 022301-5
2019
Multimaterial Bathless Sterolithography using Aerosol Jet Printing and Laser based Polymerization
Proc. International Congress on Applications of Lasers & Electro-Optics (ICALEO) 2018
2018
Simulation of an efficient particle extraction for the detection of explosive materials
Journal of Laser Applications
3
30
032201-1 - 032201-5
2018
Spiky Nickel Electrodes for Electrochemical Oxygen Evolution Catalysis by Femtosecond Laser Structuring
International Journal of Electrochemistry
9875438
2018
Simulation of an efficient particle extraction for the detection of explosive materials
Proc. International Congress on Applications of Lasers & Electro-Optics (ICALEO)
P109
2017
Femtosecond-laser-based fabrication of metal/PDMS composite microstructures for mechanical force sensing
Optical Materials Express
11
7
4203-4213
2017
UV laser direct writing of 2D/3D structures using photo-curable polydimethylsiloxane (PDMS)
Applied Physics A
7
123
495
2017
Hybrid 2D patterning using UV laser direct writing and aerosol jet printing of UV curable polydimethylsiloxane
Applied Physics Letters
12
111
121903-1-5
2017
UV Laser Photo-Polymerization of Elastic 2D/3D Structures Using Photo-Curable PDMS (Polydimethylsiloxane)
Journal of Laser Micro/Nanoengineering
2
12
153-158
2017
Broadband millimeter-wave anti-reflection coatings on silicon using pyramidal sub-wavelength structures
Journal of Applied Physics
21
121
213103
2017
Millimeter-wave broadband antireflection coatings using laser ablation of subwavelength structures
Applied Optics
13
55
3502-3509
2016
Additional external electromagnetic fields for laser microprocessing of metals
Optics Express
23
24
27046-27058
2016
Laser Processing of Sub-Wavelength Structures on Sapphire and Alumina for Millimeter Wavelength Broadband Anti-Reflection Coatings
Journal of Laser Micro/Nanoengineering
2
11
204-209
2016
Nanostructuring of cochlear implant electrode contacts induces delayed impedance increase in vivo
physica status solidi (a)
6
212
1210-1215
2015
Polarization-dependent SERS effects of laser-generated sub-100 nm antenna structures
Nanotechnology
26
25
265302
2014
Hybrid Micro-stereo-lithography by Means of Aerosol Jet Printing Technology
Journal of Laser Micro/Nanoengineering
3
9
242-247
2014
Femtosecond-laser processing of nitrobiphenylthiol self-assembled monolayers
Applied Surface Science
248
43-46
2013
Ultrafast Laser Patterning of Thin Films on 3-D Shaped Surfaces for Strain Sensor Applications
Journal of Laser Micro/Nanoengineering
3
7
311-315
2012
Ultrashort picosecond laser processing of micro-molds for fabricating plastic parts with superhydrophobic surfaces
Applied Physics A - Materials Science & Processing
4
108
863-869
2012
Laser-induced jet formation and droplet ejection from thin metal films
Applied Physics A - Materials Science & Processing
3
106
479-487
2012
Time-resolved studies of femtosecond-laser induced melt dynamics
Optics Express
22
20
24864-24872
2012
Experimental and theoretical investigation on fs-laser-induced nanostructure formation on thin gold films
Journal of Laser Applications
4
24
42017
2012
Laser-based nanoengineering of surface topographies for biomedical applications
Photonics and Nanostructures - Fundamentals and Applications
2
9
159-162
2011
Selective cell control by surface structuring for orthopedic applications
Journal of Adhesion Science and Technology
13-14
24
2257-2270
2010
Microreplication of laser-fabricated surface and three-dimensional structures
Journal of Optics - Nouvelle Revue d Optique
12
12
124009
2010
Self-assembled organic monolayers as high-resolution resists in rapid nonlinear processing with single femtosecond laser pulses
Applied Physics A - Materials Science & Processing
3
101
401-466
2010
Multi-focus two-photon polymerization technique based on individually controlled phase modulation
Optics Express
16
18
17193-17200
2010
Femtosecond Laser Fabricated Spike Structures for Selective Control of Cellular Behavior
Journal of Biomaterials Applications
3
25
217-233
2010
Picosecond and Femtosecond Laser Machining May Cause Health Risks Related to Nanoparticle Emission
Journal of Laser Micro/Nanoengineering
3
4
159-164
2009
The hydrophobic properties of femtosecond lasers fabricated spike structures and their effects on cell proliferation
physica status solidi (a)
6
206
1348-1351
2009
Nanostructuring of thin gold films by femtosecond lasers
Applied Physics A - Materials Science & Processing
2
94
221-230
2009
Three dimensional microstructuring of biopolymers by femtosecond laser irradiation
Applied Physics Letters
26
95
263703
2009
Subwavelength patterning of alkylsiloxane monolayers via nonlinear processing with single femtosecond laser pulses
Applied Physics Letters
92
223111
2008
Laser imprinting of 3D structures in gel-based titanium oxide organic-inorganic hybrids
Applied Physics A - Materials Science & Processing
1-2
A84
27-30
2006
Maskless nonlinear lithography with femtosecond laser pulses
Applied Physics A - Materials Science & Processing
1
82
23-26
2006
Nanotexturing of gold films by femtosecond laser-induced melt dynamics
Applied Physics A - Materials Science & Processing
2
81
325-328
2005
Direct-write subwavelength structuring with femtosecond laser pulses
Optical Engineering
5
44
51103-1-5
2005
Influence of spatiotemporal coupling induced by an ultrashort laser pulse shaper on a focused beam profile
Applied Optics
6
44
1092-1098
2005
Fabrication of buried waveguides and nanocrystals in Er³+-doped oxyfluoride glass
physica status solidi (a)
7
202
R73-R75
2005
Control over a phase state of the laser plume ablated by femtosecond laser: spatial pulse shaping
Journal of Applied Physics
5
95
2250-2257
2004
Formation of microbumps and nanojets on gold targets by femtosecond laser pulses
Applied Physics A - Materials Science & Processing
4-6
79
879-881
2004
Three-dimensional nanostructuring with femtosecond laser pulses
IEEE Transactions on Nanotechnology
4
3
468-472
2004
Towards nanostructuring with femtosecond laser pulses
Applied Physics A - Materials Science & Processing
77
229-235
2003
Zeitschriftenaufsatz (non-reviewed) (17)
Anti-reflection coating of laser-ablated sub-wavelength structure for millimeter-wave alumina filters
Proc. SPIE 13102, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XII
131021Z
2024
Laser ablated subwavelength structure antireflection coating on an alumina lens
Proc. SPIE 13102, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XII
131020E
2024
3D printed alumina as a millimeter-wave optical element
Proc. SPIE 13102, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XII
131022N
2024
Acousto-optic pulse-selective laser beam deflection for micromachining with ultrashort pulsed lasers
Proc. Lasers in Manufacturing (LiM)
2023
Acousto-optic pulse-selective laser beam deflection for micromachining with ultrashort pulsed lasers
Proc. Lasers in Manufacturing (LiM)
2023
Molded parts with functional surfaces: Laser micromachining of injection molds
Proc. Bioinspired Materials
2022
All-optical focused ultrasound detector for intravascular applications
SPIE Proceedings Vol. 11642, Photons Plus Ultrasound: Imaging and Sensing
116421U
2021
The MOONRISE: payload for mobile selective laser melting of lunar regolith
Proc. SPIE 11852
118526T
2021
Molded parts with functional surfaces - how laser microstructuring can be used for low-cost mass products
Proc. Lasers in Manufacturing (LiM)
2021
Divide-and-conquer laser beam deflection system: fast, wide-ranging and flexible
Laser-based Micro- and Nanoprocessing XIV
11268
6
2020
High quality bessel beam generation through reflective axicon for glass microprocessing
Proc. International Congress on Applications of Lasers & Electro-Optics (ICALEO)
micro 902
2019
Additive manufacturing by UV laser direct writing of UV-curable PDMS
Proc. Lasers in Manufacturing (LiM)
2017
UV Laser Photo-Polymerization of Elastic 2D/3D Structures Using Photo-Curable PDMS (Polydimethylsiloxane)
Proc. International Symposium on Laser Precision Microfabrication (LPM)
153-158
2017
Additive Manufacturing of Polymer Based Waveguides using Hybrid μ-Stereo Lithography
Proc. International Conference on Applied Optics and Photonics
1-2
2016
Konferenzbeiträge (65)
Demonstration of IR absorptive filter using alumina with laser ablated sub-wavelength structure for millimeter-wave alumina filters
SPIE Astronomical Telescopes + Instrumentation
16.-21. Juni
Yokohama
2024
Development of IR-absorptive alumina filter with laser-ablated motheye anti-reflection coating for ground-based CMB polarization telescopes
79th Annual Meeting (2024), The Physical Society of Japan
16.-19. September
Hokkaido University, Sapporo, Japan
2024
Demonstration of IR absorptive filters using alumina with laser ablated anti-reflection subwavelength structures for ground-based CMB polarization telescopes
The Physical Society of Japan Spring Meeting (JPS)
18.-21. März
online
2024
A broadband silicon vacuum window at the millimeter-wave band using laser-machined sub-wavelength structures
SPIE Astronomical Telescopes + Instrumentation
16.-21. Juni
Yokohama
2024
The MOONRISE flight model development for laser melting of regolith on the lunar surface
International Conference on Space Optics (ICSO) 2024
22. Oktober
Antibes Juan-les-Pins, Frankreich
2024
3D printed alumina as a millimeter-wave optical element
SPIE Astronomical Telescopes + Instrumentation
16.-21. Juni
Yokohama
2024
Precise Laser Processing of Complex Surfaces based on Triangulation and Real-Time Coordinate Transformation
Conference on Lasers in Manufacturing (LiM)
26.-29. Juni
München
2023
Laser Patterning of Thin Film Sensors on Bearing Shells
24th International Symposium on Laser Precision Microfabrication (LPM)
13.-16. Juni
Hirosaki
2023
Precise Laser Processing of Complex Surfaces based on Triangulation and Real-Time Coordinate Transformation
Conference on Lasers in Manufacturing (LiM)
26.-29. Juni
München
2023
Acousto-optic pulse-selective laser beam deflection for micromachining with ultrashort pulsed lasers
Conference on Lasers in Manufacturing (LiM)
26.-29. Juni
München
2023
Adjustable Material Transfer in the Flexographic Printing Process Using Laser-Induced Microstructured Printing Forms for the Production of Polymer Optical Waveguides
International Congress on Applications of Lasers & Electro Optics (ICALEO)
16.-19. Oktober
Chicago
2023
Cost efficient production of superhydrophobic surfaces by injection molding of laser-generated stochastic structures
FEMS EUROMAT
03.-07. September
Frankfurt
2023
All-optical focused ultrasound detector for intravascular applications
SPIE Photonics West: BiOS
6.-11. März
online
2021
A Novel All-Optical Focused Ultrasound Detector for Intravascular Lipid Imaging
European Conferences on Biomedical Optics (ECBO)
20.-24. Juni
online
2021
The MOONRISE: payload for mobile selective laser melting of lunar regolith
International Conference on Space Optics - ICSO
30. März - 02. April
online
2021
Divide-and-conquer laser beam deflection system: fast, wide-ranging and flexible
SPIE Photonics West: LASE
01.-06. Februar
San Francisco
2020
Laser Melting of Lunar Regolith Simultant under Different Gravity Conditions Using the Moonrise-Payload
8th European Lunar Symposium
12.-14. Mai
online
2020
Surface functionalization of flexographic printing forms using a femtosecond laser for adjustable material transfer in MID produ
SPIE Photonics West: LASE
01.-06. Februar
San Francisco
2020
Ablation and functionalization of flexographic printing forms using femtosecond lasers for additively manufactured polymer-optical waveguides
11th CIRP Conference on Photonic Technologies (LANE)
07.-10. September
online
2020
Characterization and Functionalization of Flexographic Printing Forms for an Additive Manufacturing Process of Polymer Optical Waveguides
International Congress on Applications of Lasers & Electro Optics (ICALEO)
19.-22. Oktober
online
2020
Process controller for scanning laser surface machining on cylinder surfaces
Lasers in Manufacturing (LiM)
23.-27. Juni
München
2019
Multimaterial Bathless Sterolithography using Aerosol Jet Printing and Laser based Polymerization
International Congress on Applications of Lasers & Electro-Optics (ICALEO)
14.-18. Oktober
Orlando
2018
Surface functionalization under water using picosecond and femtosecond laser pulses – first observations and novel effects
International Conference on Photonic Technologies (LANE)
03.-06. September
Fürth
2018
Simulation of an efficient particle extraction for the detection of explosive materials
International Congress on Applications of Lasers & Electro-Optics (ICALEO)
22.-26. Oktober
Atlanta
2017
Hybrid UV laser direct writing of UV curable PDMS thin film using aerosol jet printing
International Conference on Laser Ablation (COLA)
3.-8. September
Marseille
2017
Fabrication of silver/PDMS composite microstructures by using femtosecond laser
International Symposium on Laser Precision Microfabrication (LPM)
5.-8. Juni
Toyama
2017
PDMS/metal composite nanowire fabrication by femtosecond laser direct writing
International Conference on Laser Ablation (COLA)
3.-8. September
Marseille
2017
Additive manufacturing by UV laser direct writing of UV-curable PDMS
Lasers in Manufacturing (LiM)
26.-29. Juni
München
2017
UV Laser Photo-Polymerization of Elastic 2D/3D Structures Using Photo-Curable PDMS (Polydimethylsiloxane)
International Symposium on Laser Precision Microfabrication (LPM)
5.-8. Juni
Toyama
2017
Additive Manufacturing of Polymer Based Waveguides using Hybrid μ-Stereo Lithography
International Conference on Applied Optics and Photonics
17.-21. Mai
Hannover
2016
Investigation and application of laser induced surface functionalization with pulse delays between 40ns and 50μs on silicon and steel foils
Conference on Lasers in Manufacturing (LiM)
22.-25. Juni
München
2015
Investigations on repetition rate and laser wavelength for efficient generation of black silicon solar cells
International Conference on Sustainable Design and Manufacturing (SDM)
28.-30. April
Cardiff
2014
Uni-directional liquid spreading realized by laser-based surface structuring
Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO®/Europe-EQEC)
12.-16. Mai
München
2013
Laser patterning of thin film strain gauges
International Congress on Applications of Lasers & Electro Optics (ICALEO)
6.-10. Oktober
Miami
2013
Patterning of thin film strain gauges
International Congress on Applications of Lasers & Electro Optics (ICALEO)
6.-10. Oktober
Miami
2013
Patterning of thin film strain gauges on 3D-surfaces
AMA Conferences SENSOR, OPTO, IRS²
14.-16. Mai
Nürnberg
2013
Patterning and trimming of thin film strain sensors
International Conference of the European Society for Precision Engineering and Nanotechnology (euspen)
27.-31. Mai
Berlin
2013
Laser Thin Film Patterning of Embedded Strain Sensors on Non-planar Surfaces
Joint Symposium on System-integrated Intelligence: New Challenges for Product and Production Engineering (SysInt)
27.-29. Juni
Hannover
2012
3D-Dünnschicht-Dehnungssensoren für neue Anwendungen
MikroLas Innovationsforum
6.-7. März
Rostock
2012
Ultrafast Laser Patterning of Thin Films on 3-D Shaped Surfaces for Strain Sensor Applications
International Symposium on Laser Precision Microfabrication (LPM)
12.-15. Juni
Washington DC
2012
Heat-induced structure formation in metal films generated by single ultrashort laser pulses
SPIE Photonics West: LASE
21.-26. Januar
San Francisco
2012
Laser-induced Transfer Of Metal Nanoparticles
International Symposium on High Power Laser Ablation
18.-22. April
Santa Fe
2010
Individually controlled multi-focus laser processing for two-photon polymerization
SPIE Photonics West: LASE
23.-28. Januar
San Francisco
2010
Time-resolved imaging of hydrogel transport by laser-induced forward transfer (LIFT)
International Symposium on Laser Precision Microfabrication (LPM)
7.-10. Juni
Stuttgart
2010
Oberflächenstrukturierung von Cochlea-Implantaten
Thementage Grenz- und Oberflächentechnik (ThGOT) und Biomaterial – Kolloquium
15.-17. September
Friedrichroda
2009
Femtosecond laser-induced surface structures on Platinum
International Symposium on Contact Angle, Wettability and Adhesion
14.-16. Juli
Orono
2008
Funktionalisierung von Implantatoberflächen durch nano- und mikroskalische Topographien am Beispiel des Cochlea-Implantates
NanoDay
27. September
Hannover
2007
Picosecond Laser Material Processing - Prospects and Limitations
International Congress on Applications of Lasers & Electro Optics (ICALEO)
30. Oktober-2. November
Scottsdale
2006
Toward femtosecond laser lithography
SPIE Photonics Europe: Nanophotonics
3.-5. April
Straßburg
2006
Lithography by maskless laser direct writing
Pacific International Conference on Applications of Lasers and Optics (PICALO)
3.-5. April
Melbourne
2006
Multiphoton laser lithography for the fabrication of plasmonic components
SPIE Optics + Photonics: NanoScience + Engineering
16.-17. August
San Diego
2006
Femtosecond laser lithography and applications
SPIE Photonics West: LASE
21.-26. Januar
San Jose
2006
Femtosecond Rapid Prototyping Technique for Patterning of Lithium Niobate Samples
Advanced Solid-State Lasers (ASSL)
6.-9. Februar
Wien
2005
Direct-write sub-wavelength surface texturing with femtosecond laser pulses
Conference on Lasers in Manufacturing (LiM)
13.-16. Juni
München
2005
Direct-write micro- and nanostructuring with femtosecond lasers
Symposium MM: Ultrafast Lasers for Materials Science
30. November-1. Dezember
Boston
2004
High resolution sub-diffraction material processing with femtosecond lasers
International Congress on Applications of Lasers & Electro Optics (ICALEO)
4.-7. Oktober
San Francisco
2004
Toward nanostructuring with femtosecond laser pulses
International Symposium on Laser Precision Microfabrication (LPM)
11.-14. Mai
Nara
2004
Nanostructuring of solids with femtosecond laser pulses
SPIE High Power Laser Ablation
25.-30. April
Taos
2004
Femtosecond laser ablation and nanostructuring
SPIE High Power Laser Ablation
22-26. April
Taos
2002
Nanostructuring of metal layers and transparent materials with femtosecond laser pulses
International Congress on Applications of Lasers & Electro Optics (ICALEO)
14.-17. Oktober
Scottsdale
2002
Buchkapitel (4)
Laser patterning of thin film strain sensors on technical surfaces
In:
Cyber-Physical and Gentelligent Systems in Manufacturing and Life Cycle
Academic Press
London
210-223
2017
Die Hybride Mikro-Stereolithographie als Weiterentwicklung in der Polymerbasierten Additiven Fertigung
In:
Additive Manufacturing Quantifiziert
Springer Vieweg
Berlin, Heidelberg
85-99
2017
Metallic Superhydrophobic Surfaces
In:
Superhydrophobic Surfaces
Elsevier Science
St. Louis
87–112
2015
Recent Progress in Direct Write 2D and 3D Photofabrication Techniques with Femtosecond Laser Pulses
In:
Recent advances in laser processing of materials
Elsevier
Amsterdam
243-274
2006